High Voltage Electron Microscope Laboratory
Since the installation of a 500 kV electron microscope in 1965, Nagoya University has seen prolific, world-leading research in the field of high voltage electron microscopes in Japan. In particular, the 1000 kV Reaction Science High Voltage Scanning Transmission Electron Microscope installed in 2010 enables reactions and phenomena occurring in gas environments to be observed, aiding in the research and development of environmental and energy-related materials. This microscope can significantly contribute to the field of green-innovation research. The laboratory is operated as an open research facility for all researchers in Nagoya University. Moving forward, as part of our efforts to become an international center of electron microscopy, joint projects with other universities, research institutes, and industries are encouraged.
Designated Associate Professor
Project : In-Situ Observation of Material Science Using High Voltage Electron Microscopy
Research Facility for Advanced Science and Technology
The clean rooms and other laboratories of the Research Facility for Advanced Science and Technology are equipped with molecular beam epitaxy, chemical vapor deposition (CVD), a sputtering system, and other film deposition equipment; a mask aligner, electron-beam lithography, inductive coupled plasma (ICP) etching, and other micro-fabrication equipment; scanning electron microscopy (SEM), electron spectroscopy for chemical analysis (ESCA), an atomic force microscope, an x-ray diffractometer, and other analytical equipment; as well as a wide range of other leading-edge equipment which is put to use in a wide array of research operations ranging from thin-film deposition for various materials to micro- and nano-fabrication and material characterization. Furthermore, this facility enforces Nanofabrication Platform Consortium Project supported by the Japanese Ministry of Education, Culture, Sports, Science and Technology (MEXT), where the facility provides technical supports on nano-material processing and nano-fabrication for numerous researchers by utilizing multi-user instruments.