C-TEFs : Center for Integrated Research of Future Electronics, Transformative Electronics Facilities
The Center for Integrated Research of Future Electronics ‒
Transformative Electronics Facilities（ C-TEFs） is an experimental
facility of IMaSS at Nagoya University. It has a large
clean room of about 1,000 m²（ Class
1,000 exposure area; Class 10,000
process area） for conducting accelerated
crystal growth, device processes,
and evaluation in GaN research
and development.
Movies
introduction（2m37s）
